Download Modelling of Microfabrication Systems by Prof. Raja Nassar, Prof. Weizhong Dai (auth.) PDF

By Prof. Raja Nassar, Prof. Weizhong Dai (auth.)

ISBN-10: 3642055362

ISBN-13: 9783642055362

ISBN-10: 3662087928

ISBN-13: 9783662087923

This booklet addresses modeling of structures which are very important to the fabrication of 3-dimensional microstructures. chosen issues are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and skinny motion pictures. versions simulating the habit of those platforms are provided, graphically illusratted, and mentioned within the mild of experimental effects. wisdom received from such versions is key for process operation and optimization. This booklet is exclusive in that it makes a speciality of excessive element ratio microtechnology. will probably be valuable to scientists, engineers, graduate scholars, and brands engaged in study and improvement for reinforcing the accuracy and precision of microfabrication structures for advertisement applications.

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1 mm for the adiabatic condition. The present model can be extended to deal with a circular mask pattern on the resist, as is seen in Fig. 5). The numerical method for solving Eqs. 5) is based on a hybrid finite element and the generalized Marchuk splitting scheme (Dai and Nassar, 1997b). A domain decomposition algorithm is used with a parallel Gaussian elimination technique to obtain the solution. The finite element is applied first to the circular pattern in the xy cross section. 6) presents the finite element mesh in the first quadrant.

Solution of Eq. 21) for the boundary conditions x = 0,  = 0; x = L,  = 0 gives the induced distortion at point x Z (x) = a(1 + v) x T (  X)d  a(1 + v) 0 x L Z L T (  X)d. 22) 0 Fig. 1. Temperature rise at the interface, normalized to the maximum rise, Tmax , as a function of pulse duration for dierent wavelengths (reprinted from Ballantyne and Hyman 1985 with permission from the American Institute of Physics) If the temperature distribution is constant over the mask (T = Tc ), it is clear from Eq.

The temperature rise was recorded for 25 mm and 35 m gap settings both in vacuum and in a 20 Torr pressure helium atmosphere. Temperature measurements were compared to the maximum temperature rise, P0 /ef f , from Eq. 13). 1, respectively. 3 calculated. This large discrepancy between observed and calculated temperature rise may be explained, according to the authors, assuming dierent parameters in P0 /ef f . However, it is not clear how much influence the polyimide insulating layer had on these temperature measurements.

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Modelling of Microfabrication Systems by Prof. Raja Nassar, Prof. Weizhong Dai (auth.)


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